Nanomotion has developed a new line of precision motion systems for semiconductor production and metrology applications. Designed to meet the demands of next-generation tools, the systems support ultra-high resolution positioning, sub-nanometer stability below 0.25 nm, and resistance to environmental factors such as vibration and temperature variation.
The stages are built and tested in a cleanroom environment engineered to minimize acoustic and mechanical interference. The system design includes provisions to prevent outgassing, enabling suitability for sensitive production environments. These capabilities make the motion systems applicable to a range of uses, including wafer and mask manufacturing, pattern generation, metrology, defect inspection, and mask repair.
“We are proud of the precision stages we’ve developed for the semiconductor industry, which offer a performance advantage for next-generation tools,” said Alan Feinstein, president of Nanomotion. “Our design, manufacturing capabilities, and investment in testing infrastructure ensure the rigor required by this industry.”
Nanomotion’s submicron stages have also been deployed in off-Earth environments, with systems qualified to run 150 million cycles under stringent outgassing and operational conditions. Thousands of units are currently in use across the semiconductor sector. The company was named a 2023 Top 10 Semiconductor Manufacturing Solution Provider.
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About Nanomotion
Nanomotion is a subsidiary of Johnson Electric that specializes in motion systems and subsystems for high-precision applications. The company’s portfolio includes motors, drivers, controllers, and custom motion stages for use in semiconductor, biomedical, and optronics markets. Founded in 1992, Nanomotion is headquartered in Yokne’am Illit, Israel, with U.S. operations based in Ronkonkoma, New York.
Source/Photo Credit: Nanomotion
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