ZEISS Semiconductor Manufacturing Technology is expanding its operations in Oberkochen, Germany, with approximately 25,000 square meters of additional space for semiconductor production and related activities. Designed to increase capacity for technologies used throughout advanced chip production, the project comes as artificial intelligence, high-performance computing and other applications continue to increase demand for more powerful microchips.

Four years after the May 2022 groundbreaking, the expansion reached an important milestone when employees began moving into the new office building in July 2026. A company restaurant will open soon, followed by additional buildings that will enter operation in stages as work across the expanded campus progresses.

Oberkochen is central to ZEISS SMT’s development and production of technologies used during critical semiconductor manufacturing processes. Its portfolio includes high-precision optics for lithography systems such as High-NA EUV, as well as systems for the production, qualification and repair of photomasks. ZEISS SMT also develops wafer inspection, metrology and defect analysis solutions and supports advanced packaging processes that combine multiple chips and functions within highly integrated systems.

Semiconductor Industry Monthly exterior image of the expanded ZEISS SMT semiconductor manufacturing facility in Oberkochen, Germany

The ZEISS SMT expansion in Oberkochen, Germany, is creating approximately 25,000 square meters of additional space for semiconductor production and production-related activities.

“With the site expansion in Oberkochen and at our international locations, we are investing proactively in the future of the semiconductor industry,” said Dr. Frank Rohmund, President and Chief Executive Officer of ZEISS SMT. “As part of this highly complex and investment-intensive ecosystem, we are taking responsibility and laying the groundwork for innovation, reliability, scalability and speed.”

Capacity expansion is also underway at other ZEISS SMT operations in Germany. A new multifunctional factory under construction in Wetzlar, Hesse, will complement the existing site, while the company’s research and development operation in Roßdorf added 300 square meters of cleanroom space in fall 2025. Work is also progressing at the high-technology site in Jena, where the Semiconductor Mask Solutions business will occupy new space for the development and production of photomask technologies.

International investments are bringing ZEISS SMT closer to customers in other major semiconductor markets. Recent additions include a training center in Shanghai and expanded logistics infrastructure in the United States and Germany. ZEISS SMT also opened a Semiconductor Innovation Center in Yongin, South Korea, in July 2026, providing local access to technologies for wafer production, advanced packaging, photomask manufacturing, inspection and metrology. Together, these investments are intended to increase the scalability of ZEISS SMT technologies, strengthen regional service and delivery capabilities and support semiconductor manufacturers as device architectures and production requirements become more complex.

About ZEISS Semiconductor Manufacturing Technology

ZEISS Semiconductor Manufacturing Technology develops lithography optics, photomask systems and solutions for advanced microchip and chiplet production. Headquartered in Oberkochen, Germany, the segment operates additional development, manufacturing, sales and service locations across Europe, Asia, Israel and the United States. To learn more about the company and its capabilities, please click here.

Source/Photo Credit: ZEISS SMT

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Molly Bakewell Chamberlin
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